SMARTIEHS (finished)

SMART InspEction system for High Speed and multifunctional testing of MEMS and MOEMS

SMARTIEHS develops an innovative measurement concept: a probing optical wafer consisting of an array of interferometers adapted to and aligned with the wafer under test. The measurement system integrates on mechanical platform two matrix of interferometer configurations (a low coherent Mireau-type interferometer and a laser Twyman-Green interferometer), 2 special illumination modules (based on laser diodes and LEDs) and novel smart pixel detector array. A multifunctional approach of the measurement concept allows the parallel inspection of passive and active parameters of 25 MEMS/MOEMS on wafer within one measurement cycle.